INERTIAL MICRO-ELECTRONIC DEVICE WITH LIQUID INTEGRATOR

摘要

The invention concerns an inertial micro-electronic device comprising, in a stack of layers, a chamber and a weight linked to the wall of said chamber via deformable elements so as to be mobile in said chamber parallel to the layers along a single direction, or sensitive direction, said mobile weight being mounted mobile in a bore of the chamber so as to form a restriction separating said chamber into two cavities, said chamber being filled with a substantially incompressible fluid forming a single phase.