发明名称 METHOD AND DEVICE FOR DETECTING AND REMOVING LOCAL SHUNT DEFECTS IN PHOTOVOLTAIC FIELD
摘要 <P>PROBLEM TO BE SOLVED: To reduce abnormality that becomes a cause of deteriorating the efficiency of a thin-film photocell. <P>SOLUTION: The photocurrent that is generated by focusing a beam 12 onto a cell 10 is measured by an ammeter 20. By adjusting the voltage at both ends of load resistance 21, the cell 10 is allowed to have a fixed voltage regardless of the photocurrent flowing to the load 21. When the beam 12 is away from the local shunt defect 14, the resistance between the beam 12 and the local shunt defect 14 due to a transparent conductive oxide 22 is increased. Thus, the photocurrent 18 that is necessary for saturating the local shunt defect 14 decreases, and the photocurrent 18 increases. Thereby, the location of the local shunt defect 14 is specified, so it is electrically removed by laser ablation. <P>COPYRIGHT: (C)2008,JPO&INPIT
申请公布号 JP2007273933(A) 申请公布日期 2007.10.18
申请号 JP20060173544 申请日期 2006.06.23
申请人 KLA-TENCOR TECHNOLOGIES CORP 发明人 ZAPALAC GEORGE H JR
分类号 H01L31/04 主分类号 H01L31/04
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