| 摘要 |
PROBLEM TO BE SOLVED: To provide a method of detecting the position of the end of a probe which can rapidly and precisely detect the positional relationship between a plurality of probes and electrodes for detection of an object to be detected even under high temperatures. SOLUTION: The method of detecting the position of the end of a probe comprises a process wherein a transparent film F is pasted to a substrate W for detection having a plurality of electrodes P in the same arrangement as wafers; a process wherein the plurality of electrodes P of the substrate W for detection are detected through the transparent film F using a first CCD camera; a process wherein the surface height of the transparent film F is detected using a switch probe; a process wherein the plurality of electrodes P of the substrate W for detection and the plurality of probes are aligned with each other; a process wherein a placement table is raised based on the surface height of the transparent film F, bringing the plurality of probes into contact with the transparent film F, to leave a pin mark M on the transparent film F; and a process wherein the positions of the ends of the plurality of probes are detected, based on the plurality of electrodes P of the substrate W for detection and the pin mark M on the transparent film F. COPYRIGHT: (C)2008,JPO&INPIT
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