| 摘要 |
PROBLEM TO BE SOLVED: To reduce the installation space and the size of a vibration control device and to simplify position adjustment work of a guide shaft. SOLUTION: This vibration control device 10 includes a fixed base 20, and a moving body (spindle) 3 which moves on an upper surface 22 of the fixed base 20. The moving body 30 includes a moving base 32, an X-direction driving motor 34, a Y-direction driving motor 36, driving force transmission mechanisms 38 and 40 for transmitting rotational driving force of each of the motors 34 and 36, and X and Y direction nut mechanisms 42 and 44 rotationally driven via the driving force transmission mechanisms 38 and 40. An X-direction guide shaft 60 and a Y-direction guide shaft 70 are laid between each of sliders 50. A nut member 92 of the nut mechanisms 42 and 44 is screwed to a male screw 98 provided to each of guide shafts 60 and 70. By the rotational driving force of the motors 34 and 36 transmitted via the power transmission mechanisms 38 and 40, the moving body 30 is moved in the axial direction (X, Y directions) of each of the guide shafts 60 and 70. COPYRIGHT: (C)2008,JPO&INPIT
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