| 摘要 |
PROBLEM TO BE SOLVED: To provide a vibration element having constitution capable of surely dissolving a warp due to stress, an optical scanner provided with the vibration element, and an image display device provided with them. SOLUTION: The vibration element comprises a first support part 19d supporting a vibration part 19a so as to vibrate it, and a second support part 19e1 provided with a driving layer 30 for vibrating the vibration part 19a and supporting the vibration part 19a to a substrate 19e through the first support part 19d. The second support part 19e1 has a recessed part 19f recessed over the entire width in the vibration axis direction of the vibration part 19a at a part adjacent to the first support part 19d, cross-sectional rigidity in the recessed part 19f becomes low differently from the other parts especially for a reduced cross-sectional shape, and thus the influence of the stress in the driving layer 30 provided in the second support part 19e1 is prevented from being extended to the first support part 19d. COPYRIGHT: (C)2008,JPO&INPIT
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