| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a low-cost and high-precision mold capable of forming a plurality of patterns at once, and a method of manufacturing the mold. <P>SOLUTION: A first layer film 120 is formed on the surface of a substrate 110 and a second layer film 130 is formed on the surface of the first layer film 120, by direct bonding by interface activation. The substrate 110, the first layer film 120 and the second layer film 130 are formed of materials of the same substance and have different plane directions. Then, a resist layer 140 is formed on the surface of the second layer film 130 and the surface of the resist layer 140 is irradiated with an electron beam A for exposure. Then, a dry etching or a wet etching is applied to the second layer film 130 by using a pattern 150 formed on the resist layer 140 as a mask. Next, the resist layer 140 is peeled to form a pattern constituted of unevenness on the surface of the second layer film 130. <P>COPYRIGHT: (C)2008,JPO&INPIT |
