| 摘要 |
PROBLEM TO BE SOLVED: To provide a simple method for manufacturing single-mode and multimode glass waveguide type optical circuits having high dimensional accuracy and low loss. SOLUTION: The method is provided with: a metal film formation process for forming a metal film 2 for reflecting laser light L on the surface of a quartz glass substrate 1; an etching process for cutting out a waveguide type optical circuit pattern 3 on the metal film 2; a core glass film formation process for mixing source gas which contains a refractive index controlling dopant and becomes a material of a glass film with O<SB>2</SB>gas, blowing the mixed gas into the waveguide type optical circuit pattern 3, condensing and irradiating the laser light L, and while treating the source gas and the O<SB>2</SB>gas by thermal oxidation reaction, forming a core glass film 8 whose refractive index is higher than that of the quartz glass substrate 1; a metal film peeling process for etching and peeling the metal film 2; and a clad glass film formation process for covering the whole core glass film 8 with a clad glass film 9 whose refractive index is lower than that of the core glass film 8. COPYRIGHT: (C)2008,JPO&INPIT |
