| 摘要 |
PROBLEM TO BE SOLVED: To provide a vibrator device which can attenuate vibration of a lateral direction with a simple structure, and can suppress a spurious signal, and prevent deterioration of electric characteristics as well. SOLUTION: The vibrator device 1 has an inclined plane 6a which inclines to a thickness direction of a piezoelectric film 7 so that the plane contacts with the piezoelectric film 7 in all outer edge part of a lower electrode 6. Vibration of the lateral direction is attenuated by the inclined plane 6a in the lower electrode 6. And, the inclined plane 6a is formed so as to be in contact with the piezoelectric film 7. Moreover, a part of the piezoelectric film 7 which faces with the inclined plane 6a in the thickness direction becomes a sound wave attenuation region 7b. Therefore, the vibration of the lateral direction is certainly attenuated in the piezoelectric film 7. Thus, the vibrator device 1 can attenuate the vibration of the lateral direction by the simple structure, and can suppress the spurious signal, and prevent deterioration of the electric characteristics as well. COPYRIGHT: (C)2008,JPO&INPIT
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