| 摘要 |
PROBLEM TO BE SOLVED: To provide a surface inspection method and a surface inspection device having a wide dynamic range by a simple constitution and capable of surface inspection by a high S/N, even if there is a large amount of the scattering light of an inspection surface itself. SOLUTION: The surface inspection method detects a foreign matter or the like on an inspection surface by irradiating the inspection surface 4 with a laser beam 7 and scanning it. The irradiation part of the laser beam is divided into a required number of detection areas, light is received by a light receiver so that detection light intensity changes among the respective detection areas, the required number of output signals of the different detection light intensity are acquired relating to an inspection part, and an output signal indicating a maximum value which is not saturated among the required number of the output signals is selected as a surface inspection signal. COPYRIGHT: (C)2008,JPO&INPIT
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