| 摘要 |
A micro-electro-mechanical system (MEMS) mirror device includes (1) a mirror, (2) a first group of spring elements coupled to one half of the mirror, (3) a first beam coupled to the first group of spring elements, (4) a first spring coupled to the first beam, and (5) a first stationary pad coupled to the first spring. The device further includes (6) a second group of spring elements coupled in parallel to another half of the mirror, (7) a second beam coupled to the second group of spring elements, (8) a second spring coupled to the second beam, (9) and a second stationary pad coupled to the second spring. The device further includes a third beam that rigidly interconnects the first and the second beams so they rotate the mirror in unison.
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