| 摘要 |
PROBLEM TO BE SOLVED: To provide a sensor head and a gas sensor having a wide dynamic range for hydrogen gas detection, high sensitivity and high-speed response, wherein output fluctuation does not occur being influenced by a using environment. SOLUTION: This sensor head is equipped with a container 64, 65, 66 transmissible selectively only by hydrogen gas, having sealability to gases other than the hydrogen gas; a three-dimensional substrate 40 having a curved surface for defining a circulation band enabling multiple circulation of a collimated surface acoustic wave; an electric sound transducer element positioned on the circulation band of the three-dimensional substrate 40, for exciting the surface acoustic wave along the circulation band; and a sensitive film 25 at least a part of which exists on at least a part of the circulation band of the three-dimensional substrate 40, to be reacted with hydrogen gas molecules. The sensor head includes hydrogen gas detection parts 25, 27, 40 stored inside the container 64, 65, 66. COPYRIGHT: (C)2008,JPO&INPIT
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