| 摘要 |
PROBLEM TO BE SOLVED: To provide a physical quantity sensor device capable of performing treatment according to the detected object, without having to previously provide a plurality of treatment programs. SOLUTION: In teaching mode performed prior to state detection of a flow channel where fluid flows, the pressure and flow rate of fluid are sampled. Also in the detection mode for detecting the state of the flow channel, the pressure and flow rate of the fluid are sampled. When the difference between the flow rate in the teaching mode and the flow rate in the detection mode, at a pressure obtained in the detection mode, is a predetermined value or larger, it is determined that there is clogging in the flow channel. COPYRIGHT: (C)2008,JPO&INPIT
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