发明名称 |
Transport and docking system for clean area application, has extraction unit arranged inside carriage, and frame coupled with removable segment such that segment is movable together with covering and extraction unit inside clean area |
摘要 |
<p>The system has a rail or roller guided extraction unit (13) arranged inside a transportation carriage (12) staying in connection with an external covering (14). The covering is supported by a frame (15) that is lockable with a frame of the carriage, which has a clean area or a clean cabin and a docking part (16). The frame is coupled with a removable segment (17) such that the segment is movable together with a covering and extraction unit inside the clean area. An outer side of the segment lies opposite to an outer side of the covering to exclude contamination of the clean area.</p> |
申请公布号 |
DE102006026363(A1) |
申请公布日期 |
2007.10.18 |
申请号 |
DE20061026363 |
申请日期 |
2006.06.07 |
申请人 |
COLANDIS GMBH;X-FAB SEMICONDUCTOR FOUNDRIES AG |
发明人 |
LUDWIG, JOACHIM;PODEWILS, MARIO VON;SCHAU, MARTIN;BUECHNER, ANDREAS |
分类号 |
H01L21/677;B65G49/07 |
主分类号 |
H01L21/677 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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