PROCESS FOR PRODUCING CARBON NANOTUBE

摘要

In a provided process for producing a carbon nanotube, a fine ruggedness is formed on a substrate surface. A catalytic metal layer of given thickness is formed on the rugged surface, and heat treatment is conducted at given temperature so as to convert the catalytic metal layer into isolated multiple microparticles. The microparticles of the catalytic metal have a uniform particle diameter, and the distribution thereof is uniform. The substrate carrying the multiple microparticles is disposed in a carbonaceous gas atmosphere, and according to the CVD method using a carbonaceous gas, carbon nanotubes are grown on the microparticles of the catalytic metal. Carbon nanotubes of desired diameter with desired layer multiplicity can be provided with high reproducibility.