| 摘要 |
PROBLEM TO BE SOLVED: To provide an ultrasonic washing device for always carrying out uniform precise washing to materials to be washed by constantly holding a resonance frequency at all the sites of a vibrating plate. SOLUTION: This ultrasonic washing device is provided with a washing tank in which washing liquid is stored and an ultrasonic vibrating body for propagating ultrasonic vibration which is 500 kHz or more to the washing liquid in the washing tank. The ultrasonic wave vibrating body is provided with a composite element array structure in which a plurality of plane-shaped ultrasonic wave vibrating elements are arranged and bonded on a vibrating plate. Each of the plurality of plane-shaped ultrasonic vibrating elements is shaped with flat ultrasonic vibrating characteristics for a predetermined object washing region, and the plate thickness difference of the vibrating site of the vibrating plate is set within the range of±3% by the mechanical working of polishing working and grinding working so that the frequency fluctuation of the ultrasonic vibration can be suppressed, and that substantially uniform ultrasonic radiation characteristics can be obtained on the whole surface of the ultrasonic vibrating body. COPYRIGHT: (C)2008,JPO&INPIT |
