发明名称 MULTIFUNCTIONAL MATERIAL HAVING CARBON-DOPED HAFNIUM OXIDE LAYER
摘要 PROBLEM TO BE SOLVED: To provide a multifunctional material having a hafnium oxide layer excellent in durability (high hardness, scratch resistance, wear resistance, chemical resistance and heat resistance) as a surface layer. SOLUTION: The multifunctional material having carbon-doped hafnium oxide layer is provided with a multifunctional layer in which at least the surface layer is made of carbon-doped hafnium oxide layer or carbon-doped hafnium alloy oxide layer. COPYRIGHT: (C)2008,JPO&INPIT
申请公布号 JP2007270318(A) 申请公布日期 2007.10.18
申请号 JP20060100517 申请日期 2006.03.31
申请人 CENTRAL RES INST OF ELECTRIC POWER IND 发明人 FURUYA MASAHIRO;TOKIWAI MORIYASU;TANAKA NOBUYUKI
分类号 C23C8/28;C23C8/20;C23C28/00;C23C28/04 主分类号 C23C8/28
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