| 摘要 |
PROBLEM TO BE SOLVED: To provide gas detecting technique capable of easily detecting the presence of a volatile organic compound of a low concentration of from several ppm to several ppb, at high sensitivity. SOLUTION: A gas detecting device comprises a sensor element having a heater layer for heating a gas detecting layer, which is formed by making an SnO<SB>2</SB>film as the gas sensing layer, on the surface of the gas sensing layer on the support substrate of a diaphragm structure in which a thin film-like support film is supported by a supporting member, and then by making a selective combustion layer on the surface of the gas sensing layer; an energizing and driving means for energizing and driving the heater layer so that the temperature of the gas sensing layer changes from the low-temperature state to the high-temperature state; and a sensing section for detecting the presence of the volatile organic compound from the electric resistance value when the temperature of the gas sensing layer changes to the high-temperature state, in which, after starting energizing and driving, the volatile organic compound is detected by using the electric resistance value in the range of a predetermined elapsed time, in which the detection sensitivity of the gas sensing layer to the volatile organic compound is meaningfully obtained to air. COPYRIGHT: (C)2008,JPO&INPIT
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