发明名称 PHYSICAL PROPERTY EVALUATION METHOD OF SAMPLE, AND PHYSICAL PROPERTY EVALUATING DEVICE OF SEMICONDUCTOR MATERIAL
摘要 PROBLEM TO BE SOLVED: To provide a method which enables simple and quick evaluation of the physical properties of semiconductor material consisting of metal oxide particles or metal sulfide particles, in particular, constitutional component consisting of amount of crystal defects, degree of crystallization and crystalline form type and/or amorphous type, using a nondestructive means and additionally, to provide a physical property evaluating device used for the implementation of these methods. SOLUTION: The physical property evaluating method of samples, irradiated with an exciting light, measuring the amounts of luminescences at a specific wavelengths generated from irradiation with the exciting light is characterized by measuring the amount of luminescence at the specific wavelength of the reference sample where physical property used as evaluation object is known; preliminarily deriving correspondence between physical properties of the reference sample and the amount of luminescence measured; measuring the amount of luminescence at the specific wavelength of a test sample, where physical property used as evaluation object is unknown; and finally evaluating the physical property of the test sample concerned through the comparison of the amount of luminescence from the test sample measured with the correspondence to the reference sample. COPYRIGHT: (C)2008,JPO&INPIT
申请公布号 JP2007271553(A) 申请公布日期 2007.10.18
申请号 JP20060100163 申请日期 2006.03.31
申请人 TOHOKU DENSHI SANGYO KK;HOKKAIDO UNIV 发明人 OTANI FUMIAKI;UCHIDA SATOSHI;YAMADA RIE
分类号 G01N21/64 主分类号 G01N21/64
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