| 摘要 |
PROBLEM TO BE SOLVED: To provide a surface profile measuring apparatus for quickly and precisely measuring a three-dimensional profile, and its method. SOLUTION: The surface profile measuring apparatus 1 measures locations of target points in the first axial direction, scans measurement locations in a plane intersecting the first axial direction, measures the profile of a measured object, and has a storage section for storing focused measured regions within a measured region, and a control section for controlling scans at the measurement locations so as to measure the locations of the target points in the first axial direction at a first level of a measurement point density within the focused measured regions and a second level of the measurement point density lower than the first level outside the focused measured regions. COPYRIGHT: (C)2008,JPO&INPIT
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