| 摘要 |
PROBLEM TO BE SOLVED: To avoid damage when an abnormal situation occurs and work burden borne by an operator who must monitor and control the single crystal pulling apparatuses through actually going to the place where the apparatuses are located by remotely monitoring and remotely operating each single crystal pulling apparatuses. SOLUTION: In a remote monitoring/operating device of single crystal pulling apparatuses, the device is provided with a means for collecting monitoring information for a plurality of single crystal pulling apparatuses and a first transmission means for transmitting the monitoring information to the remote monitoring/operating system, wherein the remote monitoring/operating system comprises a first monitor device for displaying the each monitoring information of every single crystal pulling apparatuses on divided screens, a means for selecting a specified divided screen from the divided screens, a second monitor device for displaying the information of the specified divided screen on a monitor, and an operation means for operating the single crystal pulling apparatus corresponding to the selected specified divided screen, and further is provided with a second transmission device for transmitting operating information of the operation means to the corresponding single crystal pulling apparatus and a means for operating the single crystal pulling apparatus according to the transmitted operating information. COPYRIGHT: (C)2008,JPO&INPIT
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