| 摘要 |
PROBLEM TO BE SOLVED: To provide an optical waveguide mode sensor, capable of detecting a small-sized detection sample in a label-free state with higher sensitivity at detection speed higher than those of conventional technologies utilizing surface plasmon resonance. SOLUTION: On an optical waveguide layer, a plurality of fine pores that do not penetrate the optical waveguide layer or a plurality of fine and irregular recesses and protrusions are formed, by using a chip comprising a glass, a reflecting film coating thereon, and the optical waveguide layer formed of a dielectric material or a semiconductor material on the reflecting film. This sensor is equipped with a light incidence mechanism for allowing light to enter the reflecting film from the glass side of the chip, and a light detection mechanism for detecting reflected light of light reflected by the reflecting film. By using light-incident angle domain, where reflected light intensity is changed by coupling a part or the whole of the incident light with an optical waveguide mode propagating in the optical waveguide layer, changes in the incident angle or the reflected light intensity, generated when a specimen which is a detecting object is adsorbed or stuck onto the surface of the optical waveguide layer, is read, and thereby the specimen is detected. COPYRIGHT: (C)2008,JPO&INPIT
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