| 摘要 |
An inertial drive actuator includes a vibrating substrate configured to be reciprocally moved by small reciprocally displacements generated by a displacement generating unit arranged on a fixing member. The vibrating substrate has a first electrode on a plane of the vibrating substrate and an insulating layer on the first electrode. The inertial drive actuator further includes a mobile object arranged on the plane of the vibrating substrate and having a second electrode on a plane facing the first electrode through the insulating layer, a frictional force control unit configured to control frictional force between the vibrating substrate and the mobile object such that a potential difference is applied across the first electrode and the second electrode to cause electrostatic adsorptive force to act, and a frictional force applying unit configured to frictionally couple the mobile object and the vibrating substrate to each other by magnetic adsorptive force.
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