METHOD OF REMOVING DIAMOND COATING

摘要

As shown in Fig. 3, diamond coating (30) is irradiated with oxide ion beams to thereby efficiently etch the diamond coating (30) by both of sputtering phenomenon and oxidation in step S2. Thereafter, in step S3, irradiation with argon ion beams is carried out to thereby etch the diamond coating (30) by sputtering phenomenon only. In this etching by ion beams, the diamond coating (30) can be removed more uniformly than in the use of microwave plasma, so that the danger of partial grave erosion of tool base material (20) can be avoided. Further, the tool base material (20) as it is or after minor rework can be reutilized, and there can be attained inexpensive reproduction of diamond coating working tool (12).