发明名称 High purity coriolis mass flow controller
摘要 A mass flow measurement and control device includes an enclosure with a Coriolis mass flowmeter situated therein. The Coriolis mass flowmeter has a flow-tube made of a high-purity plastic material, a driver coupled to the flow tube for vibrating the flow tube, and a pickoff coupled to the flow tube for sensing Coriolis deflections of the vibrating flow tube. A pinch valve includes an elastomeric tube made of a high-purity plastic material in fluid communication with the flow tube. An actuator with a ram operatively connected thereto is situated adjacent the elastomeric tube, and a reference surface is positioned generally opposite the ram such that the elastomeric tube is squeezable between the ram and the reference surface. A controller may also be provided, which receives an output signal from the Coriolis flowmeter and provides a control output signal to the pinch valve actuator in response to the flowmeter output signal and a setpoint signal.
申请公布号 AU2002365579(B2) 申请公布日期 2007.10.18
申请号 AU20020365579 申请日期 2002.11.25
申请人 EMERSON ELECTRIC CO. 发明人 MATTHEW G. WHEELER;MICHAEL J. BARGER;JOSEPH C. DILLE;DANIEL P. MCNULTY;TIMOTHY W. SCOTT;JEFFREY L. WHITELEY;GARY E. PAWLAS;WESLEY E. SUND
分类号 G05D1/00;G01F1/84;G05D7/06 主分类号 G05D1/00
代理机构 代理人
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