| 摘要 |
PROBLEM TO BE SOLVED: To provide a sample holder for internal structure observation or for an electronic microscope capable of observing mechanism of failure occurrence by tracking a change from a non-defective article into a defective article with the lapse of time in the same sample and the same visual field. SOLUTION: The sample holder for internal structure observation has a sample holder body, a plurality of probes, and a sample holding base for holding a sample. The sample holder further has a piezoelectric element capable of moving at least either the probe or the sample, and wiring connected to the probes to apply voltage to the sample. COPYRIGHT: (C)2008,JPO&INPIT
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