| 摘要 |
PROBLEM TO BE SOLVED: To provide a low exposure X-ray inspection device employing a super-sensitivity semiconductor radiation imager by photon counting operation and a low output high energy X-ray source. SOLUTION: A semiconductor radiation detector of super-sensitivity using CdTe is arranged in a plane shape and constituted so as to acquire a two-dimensional image. An X-rays detection signal from each semiconductor radiation detector is processed by a signal processing circuit, but a circuit for performing the discriminating operation with the signal intensity is provided in this case. Further, this discriminating operation is processed at high speed so that it is finished within the incident time of one photon. Thus, energy level of incident X-ray becomes clear, and the incident amount every energy level can be counted. An RGB image signal is created from an intensity image signal determined in each energy band, and is displayed. COPYRIGHT: (C)2008,JPO&INPIT
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