| 摘要 |
PROBLEM TO BE SOLVED: To provide a ferroelectric substance characteristic measuring instrument for measuring the hysteresis characteristic of a ferroelectric substance with high accuracy, and for evaluating the polarization characteristic of the ferroelectric substance with high accuracy. SOLUTION: A voltage source 14 outputs a triangular wave voltage. A current-voltage converter 16 reads the current flowing through a ferroelectric thin-film specimen 10 and converts it into a voltage to output a measurement signal. A reference signal source 17 outputs, as a reference signal, a signal made by superimposing two signal components on each other: one is included in the measurement signal outputted by the converter 16 and caused by the leakage current of the thin-film specimen 10, and the other is caused by parasitic capacitance of a measurement system and by capacitance of the thin-film specimen 10. A differential amplifier 21 subtracts the reference signal outputted by the signal source 17 from the measurement signal outputted by the converter 16, and the output signal of the differential amplifier 21 is taken as a measured signal, reflecting only the polarizing reversal current of the specimen 10. COPYRIGHT: (C)2008,JPO&INPIT
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