发明名称 Imprint Lithography Template to Facilitate Control of Liquid Movement
摘要 The present invention is directed to a template that features a control surface extending from a periphery of a mold toward a recessed surface of the template forming an oblique angle between a portion of the control surface disposed proximate to the periphery.
申请公布号 US2007243279(A1) 申请公布日期 2007.10.18
申请号 US20070762378 申请日期 2007.06.13
申请人 MOLECULAR IMPRINTS, INC. 发明人 MCMACKIN IAN M.;LAD PANKAJ B.;TRUSKETT VAN N.
分类号 B29C59/00 主分类号 B29C59/00
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