| 摘要 |
<P>PROBLEM TO BE SOLVED: To improve charge collection efficiency and to attain improvement in sensitivity by making a film quality uniform between a side in contact with a substrate and a film exposed side in a two-dimensional radiation detector constituted of a radiation sensible film of a CdTe material. <P>SOLUTION: A laminate film which functions as a radiation sensible film is formed on a first substrate 2, and a second substrate 5 is then stuck on a film surface where the laminate film is exposed through a carbon thick film 4 which functions as a conductive adhesive layer. A laminate film 31 in which an inner film quality is not desirable between the first substrate 2 and the laminate film is then removed by polishing to expose a film surface of a laminate film 32 with an excellent film quality, and an active matrix substrate is stuck on the film surface. Therefore, a film quality can be made excellent and uniform between the side in contact with the substrate and the film exposed side, so that charge collection efficiency is improved and improvement in sensitivity can be expected. <P>COPYRIGHT: (C)2008,JPO&INPIT |
