| 摘要 |
PROBLEM TO BE SOLVED: To improve the flatness of a surface of a glass substrate when the substrate has recessed parts such as fine scratches on the surface thereof. SOLUTION: A first etching liquid having an etching rate to the glass substrate of not less than 0.01μm/min and less than 5μm/min and a second etching liquid having an etching rate to the glass substrate of not less than 5μm/min and not greater than 15μm/min are prepared as etching liquids. When an etching process is performed firstly using the first etching liquid having the slow etching rate, the recessed parts as well as the surface of the glass substrate can be removed while preventing the recessed parts from growing particularly in the thickness direction. When an etching process is performed successively using the second etching liquid having the rapid etching rate, the surface of the glass substrate can be further more flattened. COPYRIGHT: (C)2008,JPO&INPIT
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