摘要 |
A sacrificial layer is applied in a macroporous support structure substrate. The back face of the support structure substrate is then partly removed such as to expose a region of the sacrificial layer on the back face of the support structure substrate. A thin layer is applied to the back face surface of the support structure substrate and the exposed regions of the sacrificial layer and in the pores a material removal is carried out as far as the thin layer such that the pore bases are formed from the thin layer.
|