发明名称 METHOD FOR PRODUCTION OF A THIN-LAYER STRUCTURE
摘要 A sacrificial layer is applied in a macroporous support structure substrate. The back face of the support structure substrate is then partly removed such as to expose a region of the sacrificial layer on the back face of the support structure substrate. A thin layer is applied to the back face surface of the support structure substrate and the exposed regions of the sacrificial layer and in the pores a material removal is carried out as far as the thin layer such that the pore bases are formed from the thin layer.
申请公布号 KR20070102584(A) 申请公布日期 2007.10.18
申请号 KR20077019913 申请日期 2007.08.31
申请人 QIMONDA AG 发明人 LEHMANN VOLKER
分类号 H01L21/20 主分类号 H01L21/20
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