D/A CONVERTER, D/A CONVERTING METHOD, CHARGED PARTICLE BEAM EXPOSURE DEVICE AND CHARGED PARTICLE BEAM EXPOSURE METHOD

摘要

PROBLEM TO BE SOLVED: To provide a D/A converter which makes an exposure positional accuracy higher without using a memory of a large capacity, and also can further shorten an exposure wait time.

SOLUTION: The D/A converter has a first D/A conversion circuit 11 which inputs digital data of a plurality of bits and outputs a corresponding output electric signal; and a second D/A conversion circuit 12 which inputs a correction code for the digital data, and outputs a corresponding correction electric signal. In the D/A converter, an output terminal of the first D/A conversion circuit 11 is connected to the output terminal of the second D/A conversion circuit 12, and an output electric signal is corrected by the correction electric signal. The D/A converter has a storing means 105 for storing a correction code acquired regarding the first D/A conversion circuit 11 for each bit of the digital data; and a calculating means 107 for sequentially inputting and adding the correction code for each bit of the digital data, and outputting the correction code for all bits of the digital data.

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