发明名称 |
LASER BEAM MACHINE AND WINDOW CELL |
摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide a laser beam machine that facilitates cleaning of a window cell arranged on the workpiece side of a condensing lens. <P>SOLUTION: On a Y table 9 that is freely movable in the XY directions, there is arranged a cleaning device A for cleaning the surface of a window cell 20 disposed on the workpiece side of a condensing lens 7. The cleaning device A includes a brush 55, a cylinder 51 for vertically moving the brush 55, and a motor made to revolve the brush 55 around the center axis. The brush 55 may be connected to a dust collector. The window cell is composed of germanium as the base material and coated with DLC coating on the surface oppositely facing the workpiece. <P>COPYRIGHT: (C)2008,JPO&INPIT</p> |
申请公布号 |
JP2007268557(A) |
申请公布日期 |
2007.10.18 |
申请号 |
JP20060096066 |
申请日期 |
2006.03.30 |
申请人 |
HITACHI VIA MECHANICS LTD |
发明人 |
MASUDA MITSURU;ITO YASUSHI |
分类号 |
B23K26/16;B23K26/42;H01S3/00 |
主分类号 |
B23K26/16 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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