发明名称 LASER BEAM MACHINE AND WINDOW CELL
摘要 <p><P>PROBLEM TO BE SOLVED: To provide a laser beam machine that facilitates cleaning of a window cell arranged on the workpiece side of a condensing lens. <P>SOLUTION: On a Y table 9 that is freely movable in the XY directions, there is arranged a cleaning device A for cleaning the surface of a window cell 20 disposed on the workpiece side of a condensing lens 7. The cleaning device A includes a brush 55, a cylinder 51 for vertically moving the brush 55, and a motor made to revolve the brush 55 around the center axis. The brush 55 may be connected to a dust collector. The window cell is composed of germanium as the base material and coated with DLC coating on the surface oppositely facing the workpiece. <P>COPYRIGHT: (C)2008,JPO&INPIT</p>
申请公布号 JP2007268557(A) 申请公布日期 2007.10.18
申请号 JP20060096066 申请日期 2006.03.30
申请人 HITACHI VIA MECHANICS LTD 发明人 MASUDA MITSURU;ITO YASUSHI
分类号 B23K26/16;B23K26/42;H01S3/00 主分类号 B23K26/16
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