| 摘要 |
PROBLEM TO BE SOLVED: To suppress the excess supply of slurry resulting from the slurry dispersed and being again supplied to a wire group or a work, and to carry out with more sufficient accuracy the cut-out of the work. SOLUTION: A wire saw is equipped with a wire group 12 formed of a wire 11 for cutting wound around guide rollers 10A, 10B, a slider 20 which holds a work W and cuts in and sends the work W to the wire group 12 from its upper side, and a nozzle members 14a, 14b, 15a, 15b which supply the slurry to the wire group 12 from its upper side. Moreover, the wire saw is equipped with a collection member 30 which collects the dispersed slurry by being supplied from the nozzle member 14a etc. This collection member 30 is made to be arranged in a gap formed between a work holder 22 and the work W by being attached to the work holder 22 of the slider 20. COPYRIGHT: (C)2008,JPO&INPIT |
