| 摘要 |
PROBLEM TO BE SOLVED: To detect a vertex of a surface to be measured of an object to be measured such as a lens with high precision, without being affected by a stage straightness error. SOLUTION: This shape measuring apparatus 1 includes a supporting member 3 for supporting a probe 2 movably in the direction of Z perpendicular to a scanning direction (X direction), a driving means 4 for relatively moving the supporting member 3 and the object to be measured R in the scanning direction, and moving them in the direction of Y by steps relatively by a predetermined amount each time, a step measurement means 5 for measuring the locus of the center coordinates of the probe 2 corresponding to the surface shape of the object R, from an amount of displacement in the Z direction of the probe 2 occurring when scanning in the X direction is performed at each of positions to which they are moved in the Y direction by steps, an operation means 6 for calculating the radius of curvature of the object R at each position from the locus of the probe 2 measured by the measurement means 5, and a detection means 7 for detecting the position of the vertex of the object R from the fluctuation transition of the radius of curvature at each position calculated by the operation means 6. COPYRIGHT: (C)2008,JPO&INPIT
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