| 摘要 |
<p>An optical measurement instrument for observing an inspection object three-dimensionally by a color image through a simple structure. The optical measurement instrument comprises an objective lens system for outputting first reflection light reflected from the inspection object by focusing first light of first wavelength inputted onto the inspection object, splitting second light of second wavelength inputted into second reference light and second measurement light, outputting second reflection light reflected from the inspection object by focusing second measurement light onto the inspection object, and outputting third reflection light interfering with the second reflection light by reflecting the second reference light. A three-dimensional image of the inspection object is formed using the first reflection light, and interference of the second reflection light and the third reflection light.</p> |
