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发明名称
Verfahren zur Herstellung einer Spiralinduktivität auf einem Substrat und nach einem derartigen Verfahren hergestelltes Bauelement
摘要
申请公布号
DE102004022139(B4)
申请公布日期
2007.10.18
申请号
DE20041022139
申请日期
2004.05.05
申请人
ATMEL GERMANY GMBH
发明人
JOODAKI, MOJTABA
分类号
H01L21/768;H01F17/00;H01F41/04;H01L21/02;H01L21/764;H01L23/522;H01L23/64;H01L27/08
主分类号
H01L21/768
代理机构
代理人
主权项
地址
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