| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a work processor which makes it possible to immediately know to what degree the dirt is eliminated from a work and can release the plasma of appropriate power according to the state of dirt adhered to the work. <P>SOLUTION: A plasma generator 30 releases plasma by the control of a general controller 94 and removes particles PA adhered to the work W. A photographing part 101 obtains an image of the work W before plasma treatment (image before being processed). A photographing part 102 obtains an image of the work W after the plasma treatment (image after being processed). An elimination quantity detector 941 detects the elimination quantity of the particles PA by the image before being processed and the image after being processed. A defective work determining part 942 determines whether it is a defective work or not and allows a display 97 to display information which shows that a defective work exists. A defective nozzle detector 943 detects a defective nozzle from the detected elimination quantity. <P>COPYRIGHT: (C)2008,JPO&INPIT |
