| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a transparent base plate with antireflection film excellent in weather resistance and adhesiveness. <P>SOLUTION: In the transparent base plate with antireflection film made by laminating a thin film layer on the transparent base plate, a substrate layer made of Al<SB>2</SB>O<SB>3</SB>is formed on the transparent base plate, dielectric layers having different refractive indexes are successively laminated on the substrate layer, thereby, an antireflection film made of multi-layered dielectric layer is formed. When the antireflection film is formed, a barrier layer made of a thin film of Al<SB>2</SB>O<SB>3</SB>is formed prior to film formation of the uppermost dielectric layer constituting the antireflection film. <P>COPYRIGHT: (C)2008,JPO&INPIT |
