MICROFABRICATION PROCESSING METHOD

摘要

PROBLEM TO BE SOLVED: To provide a microfabrication processing method capable of planning a long life improvement and an improvement of a microfabrication accuracy of microfabrication processing agent. SOLUTION: The microfabrication processing method is characterized by storing and using the microfabrication processing agent of aqueous solution containing at least one kind of hydrofluoric acid or ammonium fluoride in a range of a chemical temperature of 5 to 15°C for a predetermined period, and by carrying out a microfabrication of a workpiece in the range of the chemical temperature in case of using the microfabrication processing agent. COPYRIGHT: (C)2008,JPO&INPIT