PASTE COATING APPARATUS AND PASTE COATING METHOD

摘要

PROBLEM TO BE SOLVED: To provide a paste coating apparatus capable of enhancing a coating quality by coating a substrate with a necessary amount of paste, and a paste coating method. SOLUTION: The paste coating apparatus 10 is constituted so as to discharge the paste in a container 40 from a nozzle by driving a pump 34 to coat the substrate 31 and equipped with a positive pressure source 53 for supplying a pressurized gas into the container 40 and a control device 56 for supplying the pressurized gas into the container 40 when the pump 34 is driven and for stopping the supply of the pressurized gas when the driving of the pump 34 is stopped. COPYRIGHT: (C)2008,JPO&INPIT