| 摘要 |
PROBLEM TO BE SOLVED: To provide a method for manufacturing a layered body provided with a multilayer thin film particularly suitable for an electromagnetic-wave shielding film in front surface of a display unit, which can form the multilayer thin film on the surface of a long substrate with great productivity through one vapor depositing operation with the use of a substantially single evaporation source, and to provide a manufacturing apparatus therefor. SOLUTION: The method for manufacturing the layered body provided with the multilayer thin film made from a metal and a metallic compound while running the long substrate in a vacuum includes forming a plurality of vapor deposition regions in a running direction of the substrate by installing partition plates in spaces between evaporation sources and cooling drums, and supplying a reactive gas to at least one region of the vapor deposition regions. The method also includes adjusting the position of the partition plate to control a structure of the multilayer thin film. COPYRIGHT: (C)2008,JPO&INPIT
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