发明名称 |
High-accuracy pattern shape evaluating method and apparatus |
摘要 |
A quantity (or dispersion value) of a distribution of edge position due to random noise is expected to be reduced statistically to 1/N when N edge position data items are averaged. Using this property, the single page image is averaged in a vertical direction with various values of parameter S, and then the edge roughness index is calculated. The S-dependence of the edge roughness index is analyzed and a term of a dispersion value directly proportional to 1/S is determined as being due to noise.
|
申请公布号 |
US2007242885(A1) |
申请公布日期 |
2007.10.18 |
申请号 |
US20070808627 |
申请日期 |
2007.06.12 |
申请人 |
YAMAGUCHI ATSUKO;FUKUDA HIROSHI;KOMURO OSAMU;KAWADA HIROKI |
发明人 |
YAMAGUCHI ATSUKO;FUKUDA HIROSHI;KOMURO OSAMU;KAWADA HIROKI |
分类号 |
G06K9/48 |
主分类号 |
G06K9/48 |
代理机构 |
|
代理人 |
|
主权项 |
|
地址 |
|