FLUOROCARBON FILM AND PROCESS FOR PRODUCING THE SAME

摘要

This invention provides a process for producing a fluorocarbon film which can stably form a fluorocarbon film having excellent durability and functionality. The process for producing a fluorocarbon film at least a part of which is chemically bonded to a surface of a base material. The production process is characterized by conducting, in sequence, step (a) for applying plasma to a surface of a base material in a continuous or pulse manner to form active points on the surface of the base material and step (b) for applying plasma to the surface of the base material in a continuous or pulse manner in the presence of gas of a fluorocompound represented by general formula CxFy and/or C xFyOz under such conditions that active species are impacted against the surface of the base material at relatively lower collision energy than step (a).