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发明名称
气密容器的盖开启/关闭系统
摘要
遮幕喷嘴系设在FIMS中的开口部(10)上方。由惰性气体所形成用于关闭该开口部之气体遮幕被形成。掩盖系如此设置以覆盖遮幕喷嘴的一部份,来防止遮幕喷嘴的开口附近之周边气体卷入自遮幕喷嘴射出之惰性气体的气体遮幕。
申请公布号
TW200739790
申请公布日期
2007.10.16
申请号
TW095144099
申请日期
2006.11.29
申请人
TDK股份有限公司
发明人
冈部勉
分类号
H01L21/673(2006.01)
主分类号
H01L21/673(2006.01)
代理机构
代理人
林志刚
主权项
地址
日本
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