| 摘要 |
A composite plasma source and a method for separating gases using the same are provided to improve a control performance on a plasma ion energy by adopting advantages of an inductively coupled plasma as well as a capacitively coupled plasma. A composite plasma source includes a body(20), a transformer(30), a core protection tube(33), and a second capacitively coupled electrode(40). The body forms a plasma discharge chamber and contains a conductive metal, which constitutes a first capacitively coupled electrode. The transformer includes a magnetic core and a primary winding, which are coupled with the plasma discharge chamber, such that an inductively coupled plasma is formed in the plasma discharge chamber. The core protection tube encloses the magnetic core, which is arranged in the plasma discharge chamber. The second capacitively coupled electrode is arranged inside the core protection tube. |
