发明名称 Optical device and inspection module
摘要 Optical device for representing a central image ( 10 ) of an object ( 1 ) and at least one lateral image ( 11, 12, 13, 14 ) of the same object ( 1 ), with the length of the real optical path of said central image ( 10 ) being different from the length of the real optical path of said at least one lateral image ( 11, 12, 13, 14 ) and the length of the apparent optical path of said central image ( 10 ) being equal to the length of the apparent optical path of said at least one lateral image ( 11, 12, 13, 14 ), and module for the optical inspection of objects comprising such an optical device and an optical system ( 7 ) allowing a central image ( 10 ) of the object ( 1 ) and at least one lateral image ( 11, 12, 13, 14 ) of this same object ( 1 ) to be captured simultaneously. The apparent optical paths of the central image ( 10 ) and of the lateral image ( 11, 12, 13, 14 ) being identical, these two images can be captured and correctly focussed simultaneously by a same viewing system ( 7 ).
申请公布号 US7283235(B2) 申请公布日期 2007.10.16
申请号 US20050057590 申请日期 2005.02.14
申请人 ISMECA SEMICONDUCTOR HOLDING SA 发明人 SALVI ALDO
分类号 G01B11/30;G01N21/956;G02B17/04;G02B17/08;G02B27/14 主分类号 G01B11/30
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