| 摘要 |
A droplet ejection head, a method of producing the same and a droplet ejection apparatus are provided to ensure stabilized ink droplet discharge for the long-term use by placing a thin tetrahedral amorphous carbon film with high hardness below a water repellent film, thinning the water repellent film. A droplet ejection head(32) having a liquid discharge energy driving unit to discharge liquid from a nozzle(33), the droplet ejection head comprises a nozzle plate(36) provided with the nozzle for the discharge of liquid droplets, a tetrahedral amorphous carbon film(48) of thickness of 3-80nm, disposed on the nozzle plate and a water repellent film(49) with thickness of 1-30nm, disposed on the tetrahedral amorphous carbon film. The tetrahedral amorphous carbon film is formed by plasma-enhanced chemical vapor deposition method or a cathodic arc method.
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