发明名称 Dense phase processing fluids for microelectronic component manufacture
摘要 Method for processing an article by contacting the article with a dense fluid. The article is introduced into a sealable processing chamber and the processing chamber is sealed. A dense fluid is prepared by introducing a subcritical fluid into a pressurization vessel and isolating the vessel, and then heating the subcritical fluid at essentially constant volume and essentially constant density to yield a dense fluid. At least a portion of the dense fluid is transferred from the pressurization vessel to the processing chamber, wherein the transfer of the dense fluid is driven by the difference between the pressure in the pressurization vessel and the pressure in the processing chamber, thereby pressurizing the processing chamber with transferred dense fluid. The article is contacted with the transferred dense fluid to yield a spent dense fluid and a treated article, and the spent dense fluid is separated from the treated article.
申请公布号 US7282099(B2) 申请公布日期 2007.10.16
申请号 US20020253296 申请日期 2002.09.24
申请人 AIR PRODUCTS AND CHEMICALS, INC. 发明人 MCDERMOTT WAYNE THOMAS;OCKOVIC RICHARD CARL;SCHWARZ ALEXANDER
分类号 B08B3/00;B08B7/00 主分类号 B08B3/00
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