发明名称 EIN CCVD-VERFAHREN ZUR HERSTELLUNG VON RÖHRENFÖRMIGEN KOHLENSTOFF-NANOFASERN
摘要 Catalytic chemical vapor deposition comprises applying a nickel- or cobalt-based catalyst layer to a carrier without using a current. The layer is thermally activated in a reducing atmosphere before depositing carbon in the gas phase. Preferred Features: The reducing atmosphere comprises a gas mixture containing hydrogen and/or delivering hydrogen. Thermal activation is carried out at 350-700 degrees C. The carrier consists of Al2O3 or an inert ceramic. The carrier has a layer containing centers of increased surface energy and is applied by CVD or PVD.
申请公布号 AT373732(T) 申请公布日期 2007.10.15
申请号 AT20020711632T 申请日期 2002.02.12
申请人 ELECTROVAC AG 发明人 MAUTHNER, KLAUS;LEISTER, ERICH;HAMMEL, ERNST
分类号 C23C16/26;C01B31/02;C23C16/02;C30B25/00 主分类号 C23C16/26
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