发明名称 |
EIN CCVD-VERFAHREN ZUR HERSTELLUNG VON RÖHRENFÖRMIGEN KOHLENSTOFF-NANOFASERN |
摘要 |
Catalytic chemical vapor deposition comprises applying a nickel- or cobalt-based catalyst layer to a carrier without using a current. The layer is thermally activated in a reducing atmosphere before depositing carbon in the gas phase. Preferred Features: The reducing atmosphere comprises a gas mixture containing hydrogen and/or delivering hydrogen. Thermal activation is carried out at 350-700 degrees C. The carrier consists of Al2O3 or an inert ceramic. The carrier has a layer containing centers of increased surface energy and is applied by CVD or PVD. |
申请公布号 |
AT373732(T) |
申请公布日期 |
2007.10.15 |
申请号 |
AT20020711632T |
申请日期 |
2002.02.12 |
申请人 |
ELECTROVAC AG |
发明人 |
MAUTHNER, KLAUS;LEISTER, ERICH;HAMMEL, ERNST |
分类号 |
C23C16/26;C01B31/02;C23C16/02;C30B25/00 |
主分类号 |
C23C16/26 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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